HFCVD equipment of continuous hit solar heterojunction cell
Hac-101 vertical double sided hot wire CVD
Nanchang University photovoltaic research institute and Dongguan Pasa Electronic Equipment Co., Ltd. It is used in the R & D and manufacturing of amorphous silicon / crystalline silicon heterojunction (HAC) solar cells,
At the same time, it is the prototype of 150MW production line equipment.
(invention patent: zl201821326540.9, zl201821326561.0201821331132.2)
The continuous preparation of I / N and I / P films on both sides of silicon wafer can be realized without breaking vacuum;
No winding plating problem;
Special design to extend hot wire life;
Compared with the current production line I / N and I / P amorphous silicon thin films which need to be completed in two sets of equipment, it can save a group of unload / load cavities and loading and unloading automation;
There is a lot of room for capacity expansion.